Investigation of the ion scattering process from the A3B5 semiconductors by the computer simulation method
Keywords:
computer simulation, ion scattering, semiconductors, binary collision approximationAbstract
Scattering of Ar+ ions from InP(001) at the grazing incidence was studied by the binary collision approximation method. The energy and angular distributions was obtained. At the energy distribution observed few peaks corresponding to the ions scattered from atomic chains and semichannels. Received results are interested at the study of semiconductor surfaces.
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