Investigation of the ion scattering process from the A3B5 semiconductors by the computer simulation method
Keywords:
computer simulation, ion scattering, semiconductors, binary collision approximationAbstract
Scattering of Ar+ ions from InP(001) at the grazing incidence was studied by the binary collision approximation method. The energy and angular distributions was obtained. At the energy distribution observed few peaks corresponding to the ions scattered from atomic chains and semichannels. Received results are interested at the study of semiconductor surfaces.
References
. Parilis E.S., Kosshinevsky L.M., Turaev N.Yu.et al. Atomic collisions on solid surfaces. -Amsterdam: North-Holland, 1993.664p.
. Shulga V.I. Ion beam focusing by the atomic chains of a crystal lattice//Rad. Effects. -Amsterdam,1975.- V.26.-P.61-64.
. Dzhurakhalov A.A., Umarov F.F. Chain effect for the inverse mass ratio of colliding particles in grazing ionsurface interaction // Surface Coatings &Technology. – Amsterdam,1998.-V. 103-104.-P. 16-19.
. Robinson M., Torrens L.Computer simulation of atomic displacement cascades in solids in the binary collision approximation//Phys.Rev.-USA,1974.- vol.B9.-P.5008-5024.
. Dzhurakhalov A.A., Umarov F.F. Anomalous inelastic energy losses and trajectory effects at small angle ion scattering by single crystal surface // Nucl. Instr. Meth. in Phys. Res. – Amsterdam,1998.-V. B136-138.-P.1092-1096.
. O’Connor D.J.,Biersack J.P. Comparison of theoretical and empirical potentials //Nucl.Instr.Meth.Phys.Res. – Amsterdam, 1986.- .B15.P.14-17.
. Dzhurakhalov A.A., Kutliev U.O., Kalandarov B.S., Kurbonov M., Dreysse H. Study of ion scattering and dechanneling from surface defect structure by computer simulation// Computational materials science –Amsterdam.2002,24.-Р.111-116.
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